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詳細(xì)介紹
ATLEX-LR準(zhǔn)分子雷射 特點(diǎn)
- 極快的脈衝上升時(shí)間和高峰值功率密度
- 雷射頭體積 <>
- TMC（全金屬陶瓷）雷射管
- 集成真空泵和鹵素過濾器於一體
- *風(fēng)冷的主動(dòng)熱控制器
- 用於系統(tǒng)集成的 RS-485、RS232、USB 和光纖接口
- 可清洗的光學(xué)支架
- 能量穩(wěn)定的輸出模式
- 符合歐洲 CE 標(biāo)準(zhǔn)
- RoHS 規(guī)範(fàn)
ATLEX-LR Specifications | ||
Gas Medium | ArF | Units |
Wavelength | 193 | nm |
Max. Pulse Energy 1 | 12 | mJ |
| Max. stab. Energy | 10 | mJ |
Pulse Duration 2 | 5 | ns |
Beam Dimensions 2 (V x H) | 4 x 6 | mm |
Beam Divergence 2 (V x H) | 1 x 2 | mrad |
Energy Stability (standard deviation) | <> | % |
Dimensions (LxWxH) click here for details | 540 x 470 x 370 | mm |
Weight | 60 | kg |
Cooling | Air | |
Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | |
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
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