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詳細(xì)介紹
ATLEX-S準(zhǔn)分子雷射 特點(diǎn)
- 超緊湊尺寸
- 電暈電離產(chǎn)生雷射
- 高壓固態(tài)雷射脈衝產(chǎn)生
- 激光頭體積 < 3l="">
- TMC（全金屬陶瓷）雷射管容器
- 集成真空泵和鹵素過濾器於一體
- *風(fēng)冷的主動(dòng)散熱管理模組
- 用於系統(tǒng)集成的 RS-485、RS232、USB 和光纖接口
- 方便清理的光學(xué)支架
- 能量穩(wěn)定的模式
- 符合歐洲 CE 標(biāo)準(zhǔn)
- RoHS 規(guī)範(fàn)
- 醫(yī)學(xué)（屈光近視手術(shù)）
- 雷射光譜學(xué)
- 雷射微加工
- 測試和測量
ATLEX-S Specifications | |||||
Gas Medium | ArF | KrF | Units | ||
Wavelength | 193 | 248 | nm | ||
High Voltage Switching Technique | Solid State Switch | Solid State Switch | |||
Max. Rep. Rate | 300 | 500 | 300 | 500 | Hz |
Max. Pulse Energy 1 | 10 | 10 | 15 | 15 | mJ |
Max. Average Power | 2,4 | 4 | 4 | 6 | W |
Pulse Duration 2 | 5 – 8 | ns | |||
Beam Dimensions 2 (V x H) | 4 x 6 | mm | |||
Beam Divergence 2 (V x H) | 1 x 2 | mrad | |||
Energy Stability (standard deviation) | < 3=""> | % | |||
Dimensions (LxWxH) click here for details | 630 x 400 x 300 | mm | |||
Weight | 65 | kg | |||
Cooling | Air | ||||
Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | ||||
- Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
- Typical value, FWHM
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