IC697MDL653IC697MDL653
由模塊聯結成系統有三種方法：
①無底板，靠模塊間接口直接相聯，然后再固定到相應導軌上。德維森公司的V80系列PLC就是這種結構，比較緊湊。
②有底板，所有模塊都固定在底板上。如德維森公司的PPC11、PPC22和PPC31系列PLC，OMRON公司的C200Ha機，CV2000等中、大型機就是這種結構。它比較牢固，但底板的槽數是固定的，如3、5、8、10槽等等。槽數與實際的模塊數不一定相等，配置時難免有空槽。這既浪費，又多占空間，還得占空單元把多余的槽作*。
③用機架代替底板，所有模塊都固定在機架上。這種結構比底板式的復雜，但更牢靠。一些特大型的PLC用的多為這種結構。
鄭娟萍
廈門仲鑫航自動化設備有限公司
按生產廠家分
目前生產PLC的廠家較多。但能配套生產，大、中、小、微型均能生產的不算太多。較有影響的，在中國市場占有較大份額的公司有：
德國西門子公司：它有S5系列的產品。有S5－95U、100U、115U、135U及155U。135U、155U為大型機，控制點數可達6000多點，模擬量可達300多路。zui近還推出S7系列機，有S7-200（小型）、S7-300（中型）及S7-400機（大型）。性能比S5大有提高。
日本OMRON公司：它有CPM1A型機，P型機，H型機，CQM1、CVM、CV型機，Ha型、F型機等，大、中、小、微均有，特別在中、小、微方面更具特長，在中國及世界市場，都占有相當的份額。
日本三菱公司的PLC也是較早推到我國來的。其小型機F1前期在國內用得很多，后又推出FX2機，性能有很大提高。它的中、大型機為A系列。AIS、AZC、A3A等。
日本日立公司也生產PLC，其E系列為箱體式的?；鞠潴w有E-20、E-28、E－40、E－64。其I/O點數分別為12/8、16/12、24/16及40/24。另外，還有擴展箱體，規格與主箱體相同其EM系列為模塊式的，可在16～160之間組合。
日本東芝公司也生產PLC，其EX小型機及EX－PLUS小型機在國內也用得很多。它的編程語言是梯形圖，其的編程器用梯形圖語言編程。另外，還有EX100系列模塊式PLC，點數較多，也是用梯形圖語言編程。
日本松下公司也生產PLC。FP1系列為小型機，結構也是箱體式的，尺寸緊湊。FP3為模塊式的，控制規模也較大，工作速度也很快，執行基本指令僅0?l微秒。
日本富士公司也有PLC。其NB系列為箱體式的，小型機。NS系列為模塊式。
美國GE公司、日本FANAC合資的GE－FANAC的90－70機也是很吸引人的。據介紹。它具有25個特點。諸如，用軟設定代硬設定，結構化編程，多種編程語言，等等。它有914、781／782、771／772、731／732等多種型號。另外，還有中型機90－30系列，其型號有344、331、323、321多種；還有90－20系列小型機，型號為211。
Asyst 4002-6633-01 Spartan EFEM Wafer Mapper Shuttle
Nanometrics 7200-013198 Rev. G, Xenon Source, 395639
Interface PCA, 62-505780-00 Rev A01, 72-505780-00 Rev A03 RIN 845 0P3894A 395628
Nanometrics 7200-022808 Rev. C, 7300-3765 C, 395643
Thermo Electron Neslab Merlin M25 262112032000 Turns On Without Pressure
Crossing Automation/Asyst 3200-4420-01, I/O Board, 3000-4420-01, 395623
Asyst 3200-1225-03B, 3000-1225-01, 1225-03-16000649 Rev-B, 4002-9144-01, 395629
CI systems NTM-500-D, Robot speed controller 27-131089-02 missing power plug
AMAT 0010-70001 Module MFG Cassette Handler Bottom P5000 34194-01
Hitachi M-308ATE, metal etch system w power rack, Delatech scrubber gas cabinet
Lot of 2 Kulicke & Sofa 1488 plus Automatic wire bonders
Square D MCM8364M3, Monitoring Assembly, 100-300VAC L-N 50/60Hz, 395620
Nanometrics 7200-022808-R, XLS75, Xenon Source, 7300-3765-D, 395638
SVG ASML control rack, A1300 power I/O, A1850 DC power supply, Galil DMC1850
Asyst Spartan EFEM wafer mapper shuttle assy 4002-6633-01, no mapper
Kulicke and Soffa 1419-3 wire bonder, controllers 1418-1000-0, 4322-105-0
Tegal Vacuum Cassette Elevator VCE, 100/150MM, Left CW1299-10102
ZYGO KMS450i inspection system, parts tool, with controller 060-00010-01 #1118
KLA Tencor P11 surface profiler, part tool, no PC with glass stage
Nanometrics 7200-022808-R, Rev. F, XLS75, Xenon Source, 7300-3765-D, 395637
ZYGO KMS450i tower controller 291-00033-AD, parts tool, missing hard drive
SVG 20198-01-55-UF1, SVG90 elect. cabinet. w System power supply bd 99-80268-01
Asyst 4002-6446-01 Robot Wafer Mapper Dual Arm, 3200-1229-01 board, FRU, OPT
2 NEW Parker TRIPLELOK-SS, MALE Fitting,
Grounding Brush 500064237
Potentiometer, offset, auto focus 233331051, 25320-077
4 New BOC C105-17-401, NW50 KF 50 Clamp AMAT 3300-91571
Bay Advanced Technologies BEC-4404-0002-PCB InterfacePCB for Novellus
SWAGELOK SS-QC6-DC-6HC, Quick Disconnect, AMAT
FLG, KF, Blank-Off NW50.304 100311706
ATMI 203-11681-00 Vector Ultra Si
Keyboard, Video, CPU Switch Box, AB-0198S
Filter, US Filter USF Cold filters
Neslab Chiller HX-75A, LAM 778-250779-00, No Compressor
VAT throttle valve controller PM-5, 641PM-36PM-1011/292, LAM 796-093088-004
Allen Bradley 800T-QaL24G Illuminated Push Button Switch Type 4:13
Black Box SW930-A-R2 KVM Switch Box
EAGLE SIGNAL B856-511controller
Wasco 34-309953-04 SV120-S1L3B-X/2041 740 Torr Vacuum Switch For Novellus
Everflow DC Fan and DC Motor R126010DU DC 12V 0.25 Amp
Seki Denko PL1500-03 Optics cable ceof 1.1963 Gasonics pn 94-3050
Cutler Hammer E22B1 EMO Push button assembly with mounting plate
Kemet Electric Stirrer, Lapmaster INT., 110v, 500mA Fuse Rating, Used
Precision Sensors Vacuum Switch PV48W-14 20 mmHg vac.
CUI Stack DPS 090150-P5 Plug in transformer , Lot of 3
MKS Baratron 628B01TBE1B
Cable, INTF, Cent, Pully 222-018
AFx HAMAT-4 4channel Ozone monitor
Hamamatsu L8488-248 Lightning Cure LC5
Hamamatsu L8488-248 Lightning Cure LC5
Roller Wafer Asemetric Tread 13-8800-709 Rev B
Julabo FPW55 Ultra-low Refrigerated circulators with HTS, Chiller
Front Cassette Sensor, B, OCR 1DLW8-A9087
2 New Novellus 15-164339-00 Insulator RF Conductor Coil
Novellus 60-313773-00, SMC XTG 310-30-1A-X2 rectangular gate valve
Asyst Crossing Automation 9701-4843-01 Assy, PDU-AC, Cont Sys, 2U, W/PLC, 398726
Mattson 15 x 15 Quartz Insulator, Used
ASYST Crossing Automation 9701-3403-02, Fru, CPU
MKS Baratron E29B-26337
AMP 1-225672-4 Quatity of 6, RF Coax Cable Connector, AMP 1-225672-2 QTY of 1
Brooks Robots 002-7090-08 Wafer Loader, Robot
Mitsubishi Controlable FX-1PG
Cybor Module Controller 506A
Cybor Power Supply 512E
Millipore WPSLC0C1L Waferpure C0-Micro Purifier, New
Asyst Crossing Automation 9701-4843-01 Assy, PDU-AC, Cont Sys, 2U, W/PLC, Hakuto
15 New Honeywell 27-104612-00 Display digital 4-20 MA
Neslab Chiller HX-75A, TU-1 pump, No Compressor
Pump baldor VM3541 3/4HP & pump Head, looks clean
AMAT 0020-21467 Adapter Source, PVD Chamber, Sputter, Endura Tool
Lam Research 853-015030-001-C-3611 Assembly, Manual, Match Control, MiniMatch
JA-RELAY 1B-TM-DC24V-P 250 VAC 20 Pieces, Solid StateRelay SSR New
Novellus 60-313773-00, SMC XTG 310-30-1A-X2 rectangular gate valve
Neslab chiller HX+100W/C, 24376-01 REV 0.5, CoolFlow refrigerated recirculator
Neslab HX+75 A Chiller, HX75 A, Novellus heat exchanger tool, BOM 386105021706
New Square D Circuit breaker Panelboard NQOM354L600T
Brooks 002-7090-14CUR Robot with 101376 Controller, I/O Assembly 002-4674-09
HAMAT-4 4 channel Ozone monitor gas box, IN USA inc. no monitor
MCG IB23821 brushless Servo Motor
15 NEW AMAT 0020-78712 performance polymer technologies 8103048, upper seal
A&N Corporation, KF-25 4 Way Vacuum Foreline Tee
AMAT 0020-34694 Chamber liner, anodized, MXP+ or super E Etch chamber
Automation direct terminator I/O assy with T1K-01DC power supply, T1K-DEVNETS
KF25 Weldment
6 inch aluminum clamp ring flange
NorCal right angle valve 3870-01256 used
Unknown NPO3746 0632 Capacitor 50pF 15kV type61
Granville Phillips 354 Micro ION guage module series 354 Novellus G33-0000034-00
PHD inc, 19082-2-5002 parallel gripper
AMAT 0200-35160 Insert, Quartz Injector, 3 Zones
NEW AMAT 0021-76158 Case window orienter OCR
11 AMAT 0030-00171 Sets of 10 Spring Stops
10 NEW AMAT 3360-01132 Round blue grommets
AMAT 3320-02242 GSKT 1.33 CFF OFHC Copper
LAM 500035389 Electrode, One piece, Ground
AMAT 0015-20281 Rest Button
Novellus 91-00605 Quartz Ring
Linemaster switch corp SP-9970214-035000XXI footswitch accesry
AMAT 0040-84056, 300mm grooved retaining ring
SMC SYJ3140-5MOZ, 4 station manifold with valves, 0830-739169
Epson AP-3S25 AC adaptor, 15.5 VDC output
10 NEW AMAT 3700-01234 Orings, 2.859CSD x .139, Viton 75, Duro, black
RF Coax to low freq adapter, UG2557U
10 NEW AMAT 3700-01069 orings, 1.925 x .103
IVS 0001-00060 Control module for SEM
10 Collets, 10-00184-00 stainless steel, look new, price for 10
Edwards, KF25 3/8" Oring Compression Reducer, Adapter
LAM 716-011536-001. ceramic ring, cleaned
3 NEW AMAT 0040-00714-P1 Sligner chuck, Peek pads
Ergotron Arm with Keyboard and Logitech Trackball, Mouse
KF-40 Vacuum Foreline Tee Extended
KF50 to KF40 Reducer Adapter
AMAT 0190-22161 FeedThru, Flex Sleeve, 300 mm, Contact
90 degree VCR Gas fitting with swagelok connector
NEW AMAT 0021-76453 Brcket, camera interface, orienter
30 New AMAT 3880-01452 Wave Spring Washer
6 Pittman GM8712-31, LAM 676-250060-001, Gear motor, DC, 128 rpm, 60.5:1 ratio
Edwards KF40-1/4" VCR Adapter Flange
Oriental motor 2GN150K Gear head
3 New Novellus 15-120130-00
Lot of 2 AMAT 3700-01288 USE 3320-01165 Parker 50-4V-NI-R GSKT VCR 1/4 INCH
New KF50 KF16 Reducer Adapter
Novellus 10-341781-00 /1 Slow pump forline with nupro isolation valve
GEMS Sensors 177593 Flowswitch, FS-380 series, .5 GPM, Novellus 34-267665-00
AMAT 0051-07087 Gasline VCR fitting
30 NEW AMAT 3700-01129 Oring for foreline valve
NEW AMAT 0140-21868, Harness assy, wafer loader, interlock
30 NEW AMAT 3700-01093 Orings, 1.049 x .103
NEW AMAT 0021-76454 Bracket, OCR camera mount, orienter
20 NEW AMAT 3300-01133, 316 LAI tubing nut
NEW AMAT 0020-17508 Locating pin, Quartz liners, Tectra
AMAT 0020-27737 Clamp ring, 5 inch, SMRMF AL PADDED 10445ARN
NEW AMAT 3700-01686 Oring ID 49.5 MM x 3 MM CSD FKM Viton
AMAT 0140-78528 Cable Ground Wire LOTO BCX-MIRRA
NEW AMAT 0021-04244 Magnet holder block, RP-3
Lot of 13 AMAT 0020-09912 Lift Pin etch chamber
VEXTA STEPPING MOTOR, PH268-23, 2- phase 1.8/ step
KF50 to KF25 Reducer Adapter
3 NEW AMAT 0020-20663 Terminal brackets
AMAT 3690-02034 SCRMach PAN HD 6-32 x 3/16L Slot Nylon
AMAT 3780-00036 Compression Spring
AMAT, Contactor Motor Relay 1270-00037
Lot of 8 Mks HPS KF 40 Clamps, NW40 Clamps
Novellus 91-00668 Chamber Chuck cover, quartz with holes
NEW AMAT 0021-00407 Collar Ring, Showerhead, 200mm double
Electrocraft 9101-1545 model DDM-005X servo motor controller
NEW Square D 73250, KP-1 series F, pilot light transformed type
AMAT 0870-00085 Kit, assorted parts
20 NEW AMAT 0030-00170 Clip
KF40 Vacuum Foreline Tee
AMAT 0021-20514 Clamp Ring, 8 inch, SNNF, SST, E/E 3.3274MM, 116
NEW Novellus 15-115209-00 CALMAX Technology mounting block
10 NEW AMAT 3880-01379 Teflon washers, PTFE washer
2 NEW Varian VA2050 NW50, centering rings
AMAT 0520-A0470 Motor, w/brex Z PI,
2 RF Coax Connector 90 degree plate, UG270U
NEW AMAT 0150-10227 Cable, vacuum line heater chamber D
AMAT 3690-01244 90 New Button head screws hex, SST, 3/4" long
4 NEW AMAT 0200-40002 Quartz nut cover, HDP etch chamber
NEW AMAT 3920-01429 Toolgoniometer
Banner SME3126C2QD-58237 Sensor, Convergent, 940 nm, 43 mm-FP, AMAT 1400-01336
KF16 90 Degree Aluminum Vacuum Foreline Elbow
AMAT 3920-01428 Toolside, drive steel, translation stage
NEW AMAT 0040-13848 Cover OCR controller orienter
90 New AMAT 015-09133 Anodized Spring Washers
NEW AMAT 0040-13278 Cover, OCR stages orienter
NEW AMAT 0020-10347 panel, minicontroller, I/O
Resistors 1/2 W NUCLEAR MAGNETIC RESONAtor 70023845
2 NEW VAT 78175 -R1 KIT, Gate, with Viton seal, Novellus 63-254381-00
MKS Baratron Pressure 750B11TCB2GA Input +13 - 32 VDC Range 10 TORR
BNC Female to RF Female Union Patermack PF 9127
LAM 718-094756-081 Cap Electrode ESC
Motorola power adapter SPN4159A
Lot of 2 PLG, PIN, QM, 16-18AWG, 2PT, AU,NI, 4A-1-24
